Improved PDMS mold fabrication by direct etch with nanosphere self

Improved PDMS mold fabrication by direct etch with nanosphere self

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Micromachines, Free Full-Text

Effective broadband electromagnetic wave absorption performance of

Improved PDMS mold fabrication by direct etch with nanosphere self-assembly mask for Soft UV-NIL subwavelength metasurfaces fabrication

Absolute values of the etch rate Ik 1 I obtained by linear fitting

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