ALD features superb step coverage performance. The SEM images show

ALD features superb step coverage performance. The SEM images show

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Color online AFM image of Pt ALD growth on a SiO 2 and b Al 2 O 3

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TEM image of Pt nanoparticles grown from 30 cycles Pt ALD on Al 2 O 3 .

ALD features superb step coverage performance. The SEM images show

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SEM images of the surfaces at different number of ALD cycles on Si(100)